发明名称 |
Chamber, exposure apparatus, and device manufacturing method |
摘要 |
Disclosed is a chamber having a static-pressure bearing disposed therein, the chamber including an inside pressure gauge for detecting an inside pressure of said chamber, and a pressure controller for decreasing the inside pressure of the chamber on the basis of the detection made through the inside pressure gauge. This arrangement effectively prevents unwanted increase of the chamber inside pressure and avoids local breakage of the chamber.
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申请公布号 |
US2005011581(A1) |
申请公布日期 |
2005.01.20 |
申请号 |
US20040859770 |
申请日期 |
2004.06.03 |
申请人 |
SAKAMOTO EIJI |
发明人 |
SAKAMOTO EIJI |
分类号 |
H01L21/027;G03F7/20;(IPC1-7):B65B31/04;G21K5/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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