| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure electric power supplied to plasma. <P>SOLUTION: A system for measuring supplied electric power to plasma comprises a detector 25 detecting a temperature of cooling water to a vacuum tube 21; a detector 26 detecting a temperature of cooling water from the vacuum tube 21; a flowmeter 27 detecting a cooling water amount used for cooling the vacuum tube 21; a calculator 28 calculating a temperature rise value of the cooling water; a multiplier 29 calculating a product of the temperature rise value and the cooling water amount; a detector 34 detecting a temperature of cooling water to an inductive coil 31; a detector 35 detecting a temperature of cooling water from the inductive coil 31; a flowmeter 36 detecting a cooling water amount used for cooling the inductive coil 31; a calculator 37 calculating a temperature rise value of the cooling water; a multiplier 38 calculating a product of the rise temperature value and the cooling water amount; an adder 39 calculating the sum of each product; and a subtractor 43 outputting a value subtracting an output of the adder 39 from a value of the DC power of the vacuum tube 21. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
