| 摘要 |
PROBLEM TO BE SOLVED: To suppress occurrence of dust or out gas, and to allow maintenance-free or extension of maintenance cycle by extending life. SOLUTION: A ball screw device 1 has a plurality balls 5 provided between a screw shaft 3 and a nut 6 for rotation, with a holding piece 10 interposed between the balls 5. The screw shaft 3 and the nut 6 are made from stainless steel, while the holding piece 10 is made from a polyether ether ketone (PEEK) resin. A lubricant film of 0.1-10μm in thickness is provided at least on the rotation surface of the balls 5 among the track surface of the screw shaft 3, the track surface of the nut 6, and the rotation surface of the balls 5. COPYRIGHT: (C)2005,JPO&NCIPI
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