| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspecting device reducing the man days of an inspection by decreasing the number of the movement of inspection contact shoes when inspecting a plurality of kinds of inspections. SOLUTION: A conduction inspection is performed by using the probes 2, 3 and a detector 4 for a resistance value, by contacting other probe 3 to pads P2, P3, P4 in sequence, while contacting a probe 2 of an inspection contact shoe to a pad 1; therewith the inspection for electrostatic capacitance is performed by using the probe 2, a clip 10, and a detector 5 for electrostatic capacitance, while contacting the pad P1 to the probe 2. COPYRIGHT: (C)2005,JPO&NCIPI
|
