PROCESS FOR PRODUCING PLASMA DISPLAY PANEL AND APPARATUS THEREFOR

摘要

A production process in which a metal oxide film of high quality is formed on a substrate of plasma display panel. In the step of forming protective layer (8) consisting of an MgO film as a metal oxide film, film formation is carried out while controlling the partial pressure of, for example, oxygen gas in vapor deposition chamber (21) as a film forming chamber within a given range. Thus, due to the film formation with the atmosphere in vapor deposition chamber (21) controlled so as to be constant, the properties of obtained film can be stabilized and a plasma display panel capable of realizing high-quality image display can be produced.