| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical wavelength switch having a planar optical circuit structure that can realize reduction of assembly man-hour and cost. SOLUTION: The optical wavelength switch has a planar waveguide formed on a substrate. The planar waveguide is composed of a waveguide type diffraction grating comprising an input/output waveguide, a first slab waveguide that is connected to the input/output waveguide, an array waveguide that is connected in one end to the first slab waveguide, and a second slab waveguide that is connected to the other end of the array waveguide. Each waveguide has, on a sacrificial layer formed on the substrate, an under-clad layer, a core layer formed on the under-clad layer, and an over-clad layer formed on the core layer. In addition, the planar waveguide is composed of a movable beam which is fixed on the substrate at one end having the same under-clad layer, core layer and over-clad layer as the waveguide type diffraction grating, and a reflection mirror which, at the tip end of the movable beam, oppositely faces the end face of the second slab waveguide. The position of the reflection mirror is set movably in the direction vertical to the optical axis. COPYRIGHT: (C)2005,JPO&NCIPI |
