| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source making material gas injected with high pressure from a minute opening of an anode electrode flow in an injection direction without making the gas accumulate between cathode electrodes, generating good plasma by improving the ionization efficiency of the injected material gas, with reduced power consumption. SOLUTION: The ion source 1 turns the material gas injected with high pressure from the anode electrode 2 having a minute opening 7 toward an ion draw-out opening 11 of the cathode 3 of which the diameter is larger than that of the minute opening 7, into plasma by discharge generated by a high voltage impressed between the anode electrode 2 and the cathode electrode 3. The cathode electrode 3 is arranged in proximity to the minute opening 7 of the anode electrode 2 in a discharge forming area including the ion draw-out opening 11, and an opening 12 cocentric with the ion draw-out opening 11 is arranged at the outer periphery of the ion draw-out opening 11 at the discharge forming area. COPYRIGHT: (C)2005,JPO&NCIPI
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