| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for leveling a non-uniform film thickness distribution after coating even with respect to a highly viscous material, and a leveling device therefor. SOLUTION: In this leveling method, the material applied to a substrate is heated in a solvent vapor atmosphere. The leveling device has a solvent vapor producing means, a means for horizontally holding the substrate, an outer container for cutting off the substrate from the open air and a heating means for heating the material applied to the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
|
