摘要 |
<P>PROBLEM TO BE SOLVED: To provide a galvanometer mirror which is wide in the width of an angle change and is high in accuracy. <P>SOLUTION: The galvanometer mirror 1 has a mirror unit 2 which pivotally supports a plurality of reflection plates 10 and 10 having light reflection surfaces 11 by means of a support shaft 20 and an oscillation mechanism which minutely oscillates the mirror unit 2 around the support shaft 20 and a moving mechanism which moves the mirror unit 2 in an axial direction. The respective reflection plates 10 and 10 pivotally supported by at the support shaft 20 of the mirror unit 2 are arranged in parallel to each other and are so arranged that the reflection surfaces 11 and 11 of the adjacent reflection plates 10 and 10 form a prescribed angles. The mirror unit 2 minutely changes the angles of the reflection surfaces 11 around the support shaft 20 by means of the oscillation mechanism and switches the reflection surfaces 11 by means of the moving mechanism. <P>COPYRIGHT: (C)2005,JPO&NCIPI |