| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing and washing method capable of back-washing washing failure work using an existing polishing and washing apparatus, and a polishing and washing apparatus. SOLUTION: The polishing and washing apparatus 1 is provided with a polishing device 20 carrying out polishing processing of work 2, a polishing processed work transfer device 10 transferring polishing unprocessed work 2 to the polishing device 20, a washing and drying device 40 washing and drying the polishing processed work 2 which has been subjected to polishing processing by the polishing device 20, and a polishing processed work transfer device 30 transferring the polishing processed work 2 to the washing and drying device 40. Washing failure work 2' which is judged as washing failure by inspecting washed and dried work 2 washed and dried by the washing and drying device 40 is transferred to the polishing device 20 by the polishing unprocessed work transfer device 10. Next, the washing failure work 2' is transferred to the washing and drying device 40 by the polished processing work transfer device 30 without carrying out polishing processing. Thereafter, the washing failure work 2' is subjected to back washing and back drying. COPYRIGHT: (C)2005,JPO&NCIPI
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