| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus which prevents increase of foam because foam increases in an easily foaming developer in the developing process of a planar workpiece such as a substrate and sometimes give adverse influences on the manufacture. <P>SOLUTION: The developing apparatus comprises a carrying means to carry a plate to be stripped, a spraying means to spray a stripping liquid from above the objective plate, a tray disposed below the carrying means to receive the waste liquid of the stripping liquid, and a collecting means to collect the waste liquid present in the tray. In the apparatus, increase of the foam produced during manufacturing is prevented by providing the apparatus with an inclined plate and another inclined plate disposed under the first inclined plate and having a different inclination direction from that of the first plate. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
