METHOD OF MANUFACTURING MAGNETORESISTIVE EFFECT ELEMENT, MAGNETIC HEAD, HEAD SUSPENSION ASSEMBLY, AND MAGNETIC DISK DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing magnetoresistive effect element by which the deterioration of the characteristics of a magnetoresistive effect element caused by annealing can be reduced. SOLUTION: The method of manufacturing magnetoresistive effect element includes a step of forming component layers 24-27 constituting a magnetoresistive effect layer on a substrate, a step of patterning one or more layers of the component layers 24-27, and a step of forming an insulating layer 30 in the area from which one or more layers of the component layers 24-27 are removed in the patterning step. In the step of forming the insulating film 30, the layer 30 is caused to deposit on the area by projecting an ion beam of a gas containing a rare gas as the main component upon the substrate after the patterning step is performed. COPYRIGHT: (C)2005,JPO&NCIPI