| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment system where high frequency electric power is introduced into a treatment vessel, a gaseous starting material is made into plasma and the object to be treated is treated, by which the uniformity of the plasma in the treatment vessel is increased, vacuum treatment properties and the uniformity of the vacuum treatment properties can be improved, and vacuum treatment can be performed at a low cost. SOLUTION: The inside of a treatment vessel is provided with a plurality of high frequency electrodes for introducing high frequency electric power with at least two or more different frequencies. An electric power feed path for feeding high frequency electric power to the high frequency electrodes is divided after the passage of the same matching unit, and they reach each high frequency electrode. Also, in at least one electric power feed path in the respective electric power feed paths after the division, auxiliary matching units capable of controlling the impedance of the electric power feed path are provided by two or more pieces in parallel. COPYRIGHT: (C)2005,JPO&NCIPI
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