| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for synchronization for pulsed laser systems which can compose laser beams emitted from a plurality of pulsed laser systems with temporal synchronization, perform irradiation toward objects to be processed or irradiated with energy density of laser beams being raised, contribute to realizing large output, and suppress adverse effects such as thermal distortion on the objects to be processed or irradiated by effecting irradiation from a plurality of directions. SOLUTION: A plurality of pulsed laser systems 6 are provided, in each of which a laser medium 1 is excited by an excitation light source 2 for emission of a laser beam, and the laser beam is then resonated between mirrors 4, 5 for further emission. The systems are also provided with output monitors M for detecting pulse energy waveforms W1, W2 of the laser beams emitted, respectively, from the individual pulsed laser systems 6; and an optical shutter means 7 for controlling output timing of the laser beams, so that the pulse energy waveforms W1, W2 detected by the individual output monitors M are matched. COPYRIGHT: (C)2005,JPO&NCIPI
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