| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of substrates to be stored in a substrate cassette, and to carry in and carry out a substrate stored in an arbitrary rack. SOLUTION: A cassette body 1 is formed like a rectangular parallelepiped frame, and provided with an opening 1a for carrying in and carrying out glass substrates G formed on one side surface. In the cassette body 1, two or more support shafts 4 are disposed within a substantially horizontal plane substantially parallel to the carry-in and carry-out opening 1a, and the support shafts 4 of the respective stages are independently driven to rotate, whereby the glass substrates G supported thereon are carried in and carried out. COPYRIGHT: (C)2005,JPO&NCIPI
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