FREQUENCY REGULATOR OF ELECTRONIC COMPONENT AND FREQUENCY REGULATING METHOD OF ELECTRONIC COMPONENT EMPLOYING IT

摘要

A highly reliable frequency regulator of an electronic component and a frequency regulating method of an electronic component employing it in which particles produced through ion beam etching have no adverse effect on the characteristics of a product. At least the part of a control collector (4) for detecting an ion beam current (ions or electrons) which is irradiated with the ion beam is composed of an inorganic insulator (12). At least the part of the control collector (4) which is not irradiated with the ion beam (5) is composed of a conductor (13).