| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ultrashort pulsed laser beam machining process capable of manufacturing minute shapes, particularly minute three-dimensional shapes variedly, a machining device using the above process, and an optical element (structure) having a three-dimensional shape which is manufactured by the above machining device. <P>SOLUTION: The invented laser beam machining process includes a dividing-delaying optical system, a beam reshaping optical system and a beam propagating optical system. A workpiece is subjected to laser beam machining, while the illumination shapes of the respective pulsed laser beams on the face of the workpiece to be machined are spatially lapped partly or wholly. The time of the irradiation of each pulsed laser beam to the face to be machined is a length of the pulse width to one nanosecond. The dividing-delaying optical system divides a single pulsed laser beam having duration of 500 picoseconds or less into a plurality of pulsed laser beams and produces a time delay to each pulsed laser beam. The beam reshaping optical system and the beam propagating optical system are intended to adjust the illumination shape on the face to be machined, intensity distribution and the illuminating position on the face to be machined, regarding each of a plurality of the pulsed laser beams generated by the division of the single pulsed laser beam. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
