| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet processor which prevents a re-adhesion due to a fact that a chemical liquid or a waterdrop adhered to a cup is dropped to a wafer by an air flow caused by a high-speed rotation in drying, and carries out a good wafer processing. SOLUTION: A guide 9 inclined to the rotational direction of a rotary body 4 is formed for guiding a liquid body adhered to a side wall 7 and the visor 8 of a cup 6, respectively. COPYRIGHT: (C)2005,JPO&NCIPI
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