发明名称 |
MEMS digital-to-acoustic transducer with error cancellation |
摘要 |
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.
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申请公布号 |
US2005013455(A1) |
申请公布日期 |
2005.01.20 |
申请号 |
US20040781555 |
申请日期 |
2004.02.18 |
申请人 |
LOEB WAYNE A.;NEUMANN JOHN J.;GABRIEL KAIGHAM J. |
发明人 |
LOEB WAYNE A.;NEUMANN JOHN J.;GABRIEL KAIGHAM J. |
分类号 |
B81B3/00;B81B7/02;H04R1/00;H04R3/00;H04R17/00;H04R23/00;(IPC1-7):H04R25/00;H02N1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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