Charged particle detector and detecting apparatus utilizing the same

摘要

In a charged particle detector, the vacuum barrier can be reduced in size and a multichannel configuration is possible. A charged particle detector includes a metallic frame having one or more holes formed therein, a light transmitting member fixed in each of the holes of the metallic frame, an inorganic scintillation element fixed on a surface of the light transmitting member, the surface being on a first side of the member; and a photodetector disposed on a surface of the light transmitting member, the surface being on a second side opposing the first side of the member. Charged particles having passed through the inorganic scintillation element are sent via the light transmitting member to the photodetector and are detected by the photodetector.