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发明名称
Vorrichtung zur Feinpositionierung eines Bauteils
摘要
申请公布号
DE19924709(B4)
申请公布日期
2005.01.20
申请号
DE19991024709
申请日期
1999.05.28
申请人
LEICA MICROSYSTEMS HEIDELBERG GMBH
发明人
ENGELHARDT, JOHANN;KIERSCHKE, KLAUS
分类号
G02B7/16;G02B21/24;G02B21/26;(IPC1-7):G02B21/26;G12B5/00
主分类号
G02B7/16
代理机构
代理人
主权项
地址
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