| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a machining method and a machining device by a laser beam by which the laser beam converges on and irradiates correctly an arbitrary position of a machining object by measuring the surface position and the projecting and recessed parts of the object of laser beam machining. <P>SOLUTION: After placing the machining object 5 on a six-axis stage 7 and measuring the surface shape of the machining object 5 placed on this six-axis stage 7 with a position measuring instrument 8, the converging/irradiating position of the laser beam 2 is controlled so that the laser beam converges on and irradiates the prescribed position of the machining object 5 by the control part of this six-axis stage on the basis of this information. At this time, by finely moving the six-axis stage 7 or adjusting the optical axis of the laser beam 2, the converging/irradiating position is controlled. It is preferable to detect an angle formed with the projecting and recessed parts which are present on the surface of the machining object, the laser beam 2 and the surface of the machining object 5 with the position measuring device 8. It is preferable that a plurality of the position measuring devices 8 are provided and, furthermore, it is preferable that the device is moved with the movement of the converging/irradiating part of the laser beam 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
