WORKPIECE CHUCK AND ITS CONTROLLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a workpiece chuck which can decrease deformation or distortion easily induced in a workpiece (substrate) with increase in the size of the work and to provide a method for controlling the chuck. SOLUTION: The workpiece chuck to suck and mount a work has a plurality of sucking regions 81 on the workpiece mount face, and a plurality of lands 812 having the same height as that of the region wall are disposed on the inner side of each sucking region 81. The area excluding the region wall 811 and the land 812 forms a recessed part. Each sucking region 81 is independently and selectively controlled to be under elevated pressure, reduced pressure or atmospheric pressure. COPYRIGHT: (C)2005,JPO&NCIPI