| 摘要 |
PROBLEM TO BE SOLVED: To provide a component of an aligner, a mirror cylinder and the aligner capable of decreasing an amount of consumption of an inert gas supplied to maintain a moisture concentration in the components forming the aligner to not more than the predetermined value, and to provide a method for manufacturing a device. SOLUTION: A projection system mirror cylinder 28 in the aligner is composed of a laminated plurality of frame bodies 45. A projection optical system 41 is housed in the frame bodies 45. The projection optical system 41 comprises a plurality of lens elements 42 held by a lens holding mechanism 43. An inside periphery surface of the projection system mirror cylinder 28 is wholly formed by a passive state film F. COPYRIGHT: (C)2005,JPO&NCIPI
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