| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate and stable method for measuring the roll/pitch angle of a magnetic disk and to provide an instrument therefor. SOLUTION: This instrument is constituted of: a moving means for fixing a suspension 1 to a XY stage 12 and moving the stage 12 or a laser displacement meter 7; a data acquiring means for acquiring XY stage coordinate data as XY coordinates and the measured data of the laser displacement meter as a Z coordinate by moving the stage 12 or the laser displacement meter 7 with the moving means; a calculating means 10 for measuring the XYZ coordinates and calculating a roll angle and a pitch angle from the measurements of the coordinates of three or more points; and a storing means for storing the three sets of data of XY stage coordinate data obtained simultaneously by scanning on a head with the laser displacement meter 7, laser displacement meter displacement data, and data indicating whether return light exists at laser irradiation in a storage region 14 as a single set or by correlating the data sets. COPYRIGHT: (C)2005,JPO&NCIPI
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