发明名称 Method for manufacturing a composite member
摘要 Disclosed is a method for manufacturing a composite member comprising a porous substrate (1), a via (8), and a wiring (9). The method comprises exposing a first region (6) and a second region (7) in the porous substrate (1) carring a photosensitive composition (2) to a exposure beam (10) through a mask (3), the second region (7) exposedby the exposure beam (10) not more than 50% of the exposure of the first region (6), the exposure beam (10) having the wavelength that an average size of voids of the porous substrate is, as expressed by a radius of gyration, 1/20 to 10 times, and forming the via (8) and the wiring (9) by infiltrating a conductive material into the first region (6) and the second region (7) respectively. <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE>
申请公布号 EP1265468(A3) 申请公布日期 2005.01.19
申请号 EP20020253907 申请日期 2002.06.05
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ASAKAWA, KOJI;HOTTA, YASUYUKI;MATAKE, SHIGERU;HIRAOKA, TOSHIRO
分类号 H05K1/03;H05K3/00;H05K3/10;H05K3/18;H05K3/42 主分类号 H05K1/03
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