发明名称 |
Chemical mechanical polishing pad and chemical mechanical polishing method |
摘要 |
<p>A chemical mechanical polishing pad. The pad contains a water-insoluble matrix and water-soluble particles dispersed in the water-insoluble matrix material and has a polishing surface and a non-polishing surface on a side opposite to the polishing surface. <??>The pad has a light transmitting area (11) which optically communicates from the polishing surface to the non-polishing surface. The non-polishing surface of the light transmitting area has a surface roughness (Ra) of 10 mu m or less. <IMAGE></p> |
申请公布号 |
EP1498222(A1) |
申请公布日期 |
2005.01.19 |
申请号 |
EP20040016806 |
申请日期 |
2004.07.16 |
申请人 |
JSR CORPORATION |
发明人 |
SHIHO, HIROSHI;HOSAKA, YUKIO;HASEGAWA, KOU;KAWAHASHI, NOBUO |
分类号 |
B24B37/013;B24B37/20;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/013 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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