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发明名称
TARGET CATHODE ASSEMBLY
摘要
申请公布号
EP0995220(B1)
申请公布日期
2005.01.19
申请号
EP19980947307
申请日期
1998.07.20
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
ERBKAMM, WOLFGANG;STRUEMPFEL, JOHANNES;HECHT, HANS-CHRISTIAN;DIMER, MARTIN;GEHM, KLAUS;SCHULZE, DIETMAR
分类号
C23C14/35;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
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