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发明名称
OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE
摘要
申请公布号
EP1133442(A4)
申请公布日期
2005.01.19
申请号
EP19990933900
申请日期
1999.07.12
申请人
ASYST TECHNOLOGIES, INC.
发明人
BONORA, ANTHONY, C.;FOSNIGHT, WILLIAM, J.;MARTIN, RAYMOND, S.
分类号
B65G49/00;B65G49/07;H01L21/677;(IPC1-7):B65G49/07
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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