METHOD OF DELIVERING SUBSTRATES TO A FILM FORMING DEVICE FOR DISK-LIKE SUBSTRATES, SUBSTRATE DELIVERING MECHANISM AND MASK USED IN SUCH METHOD, AND DISK-LIKE RECORDING MEDIUM PRODUCING METHOD USING SUCH METHOD

摘要

The present invention has as its object the provision of a substrate delivering method enabling a disk-shaped substrate or the like having no central hole to be held in the atmosphere, and be easily placed on a sputtering apparatus. In the present invention, projected portions are provided on the central portions of the opposite surfaces of the disk-shaped substrate and the substrate is subjected to conveyance or the like while being made integral with a mask by substrate fixing means. Also, in a delivering mechanism, the substrate and the mask are held by the holding of the mask by a magnetic force and the gripping of the projected portion on the front surface of the substrate by substrate holding means, and also in a substrate holder to which the substrate is delivered, the holding of the mask by the magnetic force and the gripping of the projected portion on the back surface of the substrate are effected at a time, and during the delivery, a reduction in the magnetic force and the release of the gripping on the delivering mechanism side are effected substantially at a time. <IMAGE>