| 摘要 |
The present invention relates to a mass flow controller for a control purge and a managing method of the same. When a user sets the mode to a control purge mode capable of controlling a maximum flowing amount for constantly maintaining a maximum flowing amount when performing a purge function after the user sets a purge function mode based on a purpose of use of a mass flow controller, a control circuit compares a set value of a flowing amount inputted based on a user's selection with a previously set threshold value and controls a valve for constantly maintaining a maximum flowing amount by switching to a gain resistor for a purge mode having a gain value capable of performing a purge function and controls a valve for thereby accurately controlling a small flowing amount by switching to a gain resistor for a common control mode having a gain value capable of performing a common control function. When a user sets the mode to a purge function mode based on a state of use of a mass flow controller, fully opens a valve and sets a valve open purge mode for obtaining a maximum flowing amount, a control circuit compares a set value of a flowing amount inputted by a user with a previously set threshold value and controls a valve for fully opening a valve for thereby implementing a maximum flowing amount and accurately controlling a small flowing amount.
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