发明名称 Arrangement and method for the identification of substrates
摘要 An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprisinga turntable (2) for rotating a substrate (S) placed thereon;an illumination source (4) and a receiving device (5) for evaluating the intensity of the light emerging from the illumination source (4), the edge zone of the substrate (S) placed on the turntable (2), upon rotation thereof, influencing the light intensity striking the receiving device (5);a device (6) for reading the identification marking (I), having a sensing region (E); anda calculation device that calculates a manipulated variable for a correction rotation angle about the rotation axis (A) for alignment of the identification marking (I) with respect to the sensing region (E), and a manipulated variable for a correction motion for changing the position of the sensing region (E) with respect to the rotation axis (A) or with respect to the actual position of the identification marking (I), and outputs them to a positioning device.A corresponding identification method is also described.
申请公布号 US6845174(B2) 申请公布日期 2005.01.18
申请号 US20020050114 申请日期 2002.01.18
申请人 LEICA MICROSYSTEMS JENA GMBH 发明人 GRAU DOMINIK;BIRKNER ANDREAS;HILTAWSKI KNUT;BERNHARDT FRANK
分类号 G06K9/20;(IPC1-7):G06K9/00 主分类号 G06K9/20
代理机构 代理人
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