发明名称 |
Front opening unified pod and associated method for preventing outgassing pollution |
摘要 |
A front opening unified pod for preventing the contamination of wafers due to outgassing. The front opening unified pod includes a front opening unified pod body and a cleaning apparatus. The front opening unified pod has an opening section and a base plate within the opening section and the base plate facing each other. The cleaning apparatus has at least an air-blasting element installed inside the front opening of the unified pod body. An air supplying system connected to the air-blasting element provides a stream of air.
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申请公布号 |
US6843833(B2) |
申请公布日期 |
2005.01.18 |
申请号 |
US20030250229 |
申请日期 |
2003.06.16 |
申请人 |
POWERCHIP SEMICONDUCTOR CORP. |
发明人 |
WU JUNG-YUAN;HUANG KUO-HWA |
分类号 |
H01L21/00;H01L21/673;H01L21/677;(IPC1-7):B01D46/00;B08B3/02;B08B5/04 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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