Apparatus for automatically debonding, processing, and handling fragile slider rows

摘要

An automatic thermal debonding tool removes slider rows from a stainless steel processing fixture. The tool uses a bimodal pitch adjustment and a mechanical row detainment mechanism to remove the rows from the fixture. The tool allow full control of all critical process parameters such as accurate and repeatable row placement; controlled temperature and heat flow; controlled mechanical removal pressure; temporal control and variability; clean and contaminant-free working area; and full electrostatic discharge grounding and compatible materials. The bimodal pitch adjustment feature allows for continual, high-speed removal of the ceramic rows from the fixture after an automated heating cycle is complete. As the rows are removed, they are accurately placed into the detainment mechanism for the next process step.