STRUCTURE FOR OPENING AND SHUTTING CHAMBER OF SEMICONDUCTOR EQUIPMENT TO GREATLY EXTEND LIFETIME AND IMPROVE STABILITY

摘要

PURPOSE: A structure for opening and shutting a chamber of semiconductor equipment is provided to greatly extend a lifetime and improve stability by making an axially supported portion by a hinge axis of a hinge bracket have a completely sealed type. CONSTITUTION: A plate axially supported by a hinge axis(12) is reinforced in a hinge bracket(31) while being completely closed. A circular through hole slightly greater than the hinge axis is formed in the plate surface so that a structure for opening and shutting a chamber is inserted into the hinge axis while being capable of rotating.