APPARATUS FOR FORMING THIN FILM, PARTICULARLY REGARDING TO REGULARLY MAINTAINING UNIFORMITY OF THIN FILM FORMATION

摘要

PURPOSE: An apparatus for forming a thin film is provided to regularly maintain the uniformity of thin film formation by actively coping with a change in shape of a glass. CONSTITUTION: A gas diffusing device is installed in a chamber for supplying reaction gas and forming an upper electrode. A suscepter(50) is formed under the gas diffusing device, and in which a glass(40) is mounted. A gas exhaust part exhausts reaction-completed exhaust gas. The gas diffusing device includes a shower head diffusing the reaction gas into the chamber. The suscepter has a close contact part(52) formed at an upper side to increase a contact area, having a plurality of protrusions.