| 发明名称 |
VERBESSERTE THERMOHÄRTBARE ANTIREFLEXIONSBESCHICHTUNGEN FÜR TIEFES ULTRAVIOLETT |
| 摘要 |
Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes. |
| 申请公布号 |
AT287098(T) |
申请公布日期 |
2005.01.15 |
| 申请号 |
AT19980952017T |
申请日期 |
1998.09.28 |
| 申请人 |
BREWER SCIENCE, INC. |
发明人 |
MEADOR, JIM, D.;GUERRERO, DOUGLAS, J.;SHAO, XIE;KRISHNAMURTHY, VANDANA |
| 分类号 |
G03F7/11;C08F8/00;C08F220/32;C08F283/10;C09D133/06;G03F7/09 |
主分类号 |
G03F7/11 |
| 代理机构 |
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