发明名称 |
SEMICONDUCTOR DEVICE FOR PREVENTING CHANNEL STOP IMPLANTATION LAYER FROM BEING FORMED IN ACTIVE REGION |
摘要 |
PURPOSE: A semiconductor device is provided to improve deterioration in a transistor characteristic by preventing a channel stop implantation layer from being formed in an active region. CONSTITUTION: A semiconductor device includes a MOS transistor on an SOI layer of an SOI substrate. The SOI substrate is formed by sequentially stacking a semiconductor substrate(1), a buried insulating layer(2), and the SOI layer(3). The semiconductor device includes a random logic part and an SRAM part. The random logic part is electrically isolated by a partial separative oxide layer having the SOI layer. The SRAM part is electrically isolated by a complete separative oxide layer approaching the buried insulating layer through the SOI layer. The random logic part is formed on the SOI layer and includes a body region potential-fixable from the outside. The body region is in contact with the SOI layer under the partial separative oxide layer.
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申请公布号 |
KR20050006107(A) |
申请公布日期 |
2005.01.15 |
申请号 |
KR20040109822 |
申请日期 |
2004.12.21 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
HIRANO, YUUICHI;IWAMATSU, TOSHIAKI;MAEDA, SHIGENOBU;MAEGAWA, SHIGETO;MATSUMOTO, TAKUJI;TSUJIUCHI, MIKIO |
分类号 |
H01L21/66;H01L21/336;H01L21/76;H01L21/762;H01L21/8238;H01L21/8244;H01L21/84;H01L27/08;H01L27/092;H01L27/10;H01L27/11;H01L27/12;H01L29/786;(IPC1-7):H01L21/762 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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