发明名称
摘要 In a process of manufacturing a plurality of projection masks from a substrate at one time, the substrate is subjected only to wet etching on the reverse thereof to form grooves and is separated into the plurality of the projection masks by the use of the grooves formed on the reverse of the substrate./!
申请公布号 KR100456931(B1) 申请公布日期 2005.01.15
申请号 KR19970002919 申请日期 1997.01.31
申请人 发明人
分类号 H01L21/027;G03F1/16;G03F1/22;H01L21/306 主分类号 H01L21/027
代理机构 代理人
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