发明名称 SCINTILLATION PLATE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a scintillation plate having high emission efficiency without losing resolution. SOLUTION: In the scintillation plate, a plurality of pores penetrating in the thickness direction of a flat substrate are formed on the flat substrate, the sectional area of the pores differs between the upper and lower surface sides of the substrate, and a scintillation material emitting light by irradiating radiation is filled into the pores. ZnS (P<SB>2</SB>O) powder that is a scintillation material is filled into pore regions 1 arranged in a matrix. The pore area of an outlet 3 is relatively smaller than that of an inlet 2. A partition region 4 is formed by Cu, an aluminum thin film 5 as a light reflection layer is formed on the surface at the inlet side, and a C (carbon) film 6 is formed at the outlet side as a protective layer. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005009872(A) 申请公布日期 2005.01.13
申请号 JP20030170811 申请日期 2003.06.16
申请人 CANON INC 发明人 OTSUKA MITSURU
分类号 G21K4/00;G01T1/20;H01J37/244;(IPC1-7):G01T1/20 主分类号 G21K4/00
代理机构 代理人
主权项
地址