发明名称 Arrangement for the optical detection of light radiation which is excited and/or backscattered in a specimen with a double-objective arrangement
摘要 Arrangement and method for the optical detection of light radiation which is excited and/or backscattered in a specimen, wherein the illumination of the specimen and/or the detection of the specimen light is carried out by at least two objectives arranged on different sides of the specimen. The specimen illumination is focused in or in the vicinity of a pupil plane of the beam path between the specimen plane and the detection plane at least on one axis and an element for the spatial separation of the illumination light from the detection light are provided in this plane.
申请公布号 US2005006597(A1) 申请公布日期 2005.01.13
申请号 US20040888896 申请日期 2004.07.09
申请人 CARL ZEISS JENA GMBH 发明人 WOLLESCHENSKY RALF;KEMPE MICHAEL
分类号 G01N21/64;G02B21/00;G02B21/06;G02B21/18;G02B26/10;(IPC1-7):G01N21/64 主分类号 G01N21/64
代理机构 代理人
主权项
地址