| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve apparatus which has high versatility and can surely shut off the flow. SOLUTION: The valve apparatus 12 is composed of an inlet port 22, a suction port 28, a valve element 30, a body 34, and electromagnetic valves 50, 52. The valve element 30 is composed of a piston 38 which slides along a hollow portion 36 of the body 34, and an opening and closing valve 42 for opening and closing the suction port 28 by moving together with the piston 38 in a hollow portion 40. A tapered portion 44 is provided between the hollow portion 40 and the suction port 28 such that a tapered portion 46 and an O-ring 48 provided at the tip end of the opening and closing valve 42 are brought into close contact with the tapered portion 44. COPYRIGHT: (C)2005,JPO&NCIPI
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