发明名称 Liquid applying device, method for applying liquid, method for manufacturing liquid crystal device, and electronic equipment
摘要 The invention provides a method for manufacturing a liquid crystal device that is capable of controlling a wetting/spreading of a liquid crystal that is applied on and wets on a substrate. The invention can include a unit for ejecting liquid drops that applies a liquid crystal on a substrate, a multi-stage oven that preheats the substrate on which the liquid crystal is to be applied, and a cooling plate that cools down the substrate on which the liquid crystal has been applied are provided. Further, a first robot arm that automatically transfers the substrate to the unit for ejecting liquid drops from the multi-stage oven and a second robot arm that automatically transfers the substrate to the cooling plate from the unit for ejecting liquid drops can be provided.
申请公布号 US2005008766(A1) 申请公布日期 2005.01.13
申请号 US20040852208 申请日期 2004.05.25
申请人 SEIKO EPSON CORPORATION 发明人 SAKURADA KAZUAKI
分类号 G02F1/13;B05C5/00;B05D3/00;B05D3/02;G02F1/1341;(IPC1-7):B05D5/12 主分类号 G02F1/13
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