发明名称 Method for fabricating semiconductor device
摘要 A method for fabricating a semiconductor device, comprising the steps of: forming an element on a silicon substrate; packaging the element; and annealing the packaged element before its transportation or long-term storage.
申请公布号 US2005009222(A1) 申请公布日期 2005.01.13
申请号 US20040498373 申请日期 2004.09.09
申请人 ASHIDA TSUTOMU 发明人 ASHIDA TSUTOMU
分类号 H01L27/148;H01L21/02;H01L21/324;(IPC1-7):H01L21/00;H01L21/44;H01L21/48;H01L21/50 主分类号 H01L27/148
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