| 摘要 |
A substrate holding device, wherein when a substrate holder (5) allowed to swing in a rising direction on a frame (1) by the telescoping operation of a jack (19) is raised on the frame (1) by swinging, the substrate holder (5) is slid on a movement block (14) fitted to a hinge (10) for a linear guide (15) and projected beyond the edge portion (11) of a base (3), and the lower end edge of the substrate holder (5) is lowered below the edge portion (11) of the base (3) of the frame (1).
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