| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY stage capable of minimizing heating factors of a slider part and simplifying cable treatment. SOLUTION: The XY stage for controlling the position of the slider part in two-dimensional directions comprises an X-axis sensor arranged at a fixed part for detecting the position of the slider part in the X-axis direction and a Y-axis sensor arranged at a fixed part for detecting the position of the slider part in the Y-axis direction. The X-axis sensor and the Y-axis sensor of which the position is fixed are interferometers for measuring distances through the use of light interference. A mirror for casting emergent light of the X-axis sensor and the Y-axis sensor is mounted to the slider part. COPYRIGHT: (C)2005,JPO&NCIPI
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