发明名称 INTEGRATED CIRCUIT HAVING PAIRS OF PARALLEL COMPLEMENTARY FINFETS
摘要 A method and structure for an integrated circuit structure that utilizes complementary fin-type field effect transistors (FinFETs) is disclosed. The invention has a first-type of FinFET which includes a first fin (100), and a second-type of FinFET which includes a second fin (102) running parallel to the first fin (100). The invention also has an insulator fin positioned between the source/drain regions (130) of the first first-type of FinFET and the second-type of FinFET. The insulator fin has approximately the same width dimensions as the first fin (100) and the second fin (102), such that the spacing between the first-type of FinFET and the second-type of FinFET is approximately equal to the width of one fin. The invention also has a common gate (106) formed over channel regions of the first-type of FinFET and the second-type of FinFET. The gate (106) includes a first impurity doping region adjacent the first-type of FinFET and a second impurity doping region adjacent the second-type of FinFET. The differences between the first impurity doping region and the second impurity doping region provide the gate with different work functions related to differences between the first-type of FinFET and the second-type of FinFET. The first fin (100) and the second fin (102) have approximately the same width.
申请公布号 WO2005004206(A2) 申请公布日期 2005.01.13
申请号 WO2004US21279 申请日期 2004.06.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;BRYANT, ANDRES;CLARK, WILLIAM, F.;FRIED, DAVID, M.;JAFFE, MARK, D.;NOWAK, EDWARD, J.;PEKARIK, JOHN, J.;PUTNAM, CHRISTOPHER, S. 发明人 BRYANT, ANDRES;CLARK, WILLIAM, F.;FRIED, DAVID, M.;JAFFE, MARK, D.;NOWAK, EDWARD, J.;PEKARIK, JOHN, J.;PUTNAM, CHRISTOPHER, S.
分类号 H01L21/308;H01L21/336;H01L21/84;H01L27/12;H01L29/786 主分类号 H01L21/308
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