COMPLEX CHEMICAL FILTER IN WHICH FLAT CHEMICAL FILTER IS DISPOSED IN FRONT OF CORRUGATED CHEMICAL FILTER TO REDUCE PRESSURE LOSS OF FLUID PASSING THROUGH COMPLEX CHEMICAL FILTER AND FILTERING METHOD USING THE SAME

摘要

PURPOSE: To provide a complex chemical filter which improves energy efficiency, increases circulation air volume in clean room and reduces damage of the filter so that life of the filter is extended by reducing pressure loss of a fluid passing through the complex chemical filter, and a filtering method using the complex chemical filter. CONSTITUTION: The complex chemical filter comprises a flat filter(102) for adsorbing first chemical material in a fluid flown in; and a corrugated filter(104) disposed on the backside of the flat filter in a fluid inflow direction(100) to second chemical material that is different from the first chemical material in a fluid passing through the flat filter, wherein the complex chemical filter further comprises a connection member for connecting the flat filter and the corrugated filter. The filtering method comprises a step of flowing a fluid in one direction; a step of adsorbing first chemical material in the fluid onto a flat filter; and a step of adsorbing second chemical material that is different from the first chemical material in a fluid passing through the flat filter onto a corrugated filter.