APPARATUS FOR LOADING WAFER CARRIER TO PRECISELY DETECT WHETHER WAFER CARRIER IS LOADED TO PLATE

摘要

PURPOSE: An apparatus for loading a wafer carrier is provided to precisely detect whether a wafer carrier is loaded to plate by using a load port. CONSTITUTION: A protrusion formed on the lower surface of a wafer carrier is inserted into a plate(110). A groove(120) for guiding the loading position of the wafer carrier is formed on the upper surface of the plate. The wafer carrier is placed on the plate. A sensor(140) detects the protrusion inserted into the groove and determines whether the wafer carrier is loaded. A sensor block(130) is formed in a manner that the sensor is received in the bottom of the groove.