| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric sensor facilitating the wiring of a signal line to an electrode for detection even if it is downsized. <P>SOLUTION: This piezoelectric sensor 1, provided with a weight body 20 on one surface 10a side, is equipped with a vibration plate 10 for vibrating the weight body, a piezoelectric element 30 provided on the opposite side to the weight body side of the vibration plate and having electrodes 31a to 31d for detection formed on a surface 30a on the opposite side to the vibration plate side, and a wiring board 40 provided on the piezoelectric element and having first conductive paths 42a to 42d formed thereon from a surface 40b on the piezoelectric element side to a surface 40a on the opposite side to the surface. The conductive paths are electrically connected to the electrodes for detection. This makes it possible to install wiring for the electrodes for detection by sufficiently using a surface on the opposite side to the piezoelectric element side of the wiring board. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
